Synthesis of Copper Nitride Layers by the Pulsed Magnetron Sputtering Method Carried out under Various Operating Conditions

por Wilczopolska, Magdalena, Nowakowska-Langier, Katarzyna, Okrasa, Sebastian, Skowronski, Lukasz, Minikayev, Roman, Strzelecki, Grzegorz W., Chodun, Rafal, Zdunek, Krzysztof
Publicado 2021