Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition

por Lee, Seunghwan, Park, Yonggyun, Liu, Pengzhan, Kim, Muyoung, Kim, Hyeong-U, Kim, Taesung
Publicado 2023

Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD

por Park, Yonggyun, Liu, Pengzhan, Lee, Seunghwan, Cho, Jinill, Joo, Eric, Kim, Hyeong-U, Kim, Taesung
Publicado 2023