Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit

por Peng, Xinlin, Ji, Yucheng, Chen, Shuo, Guo, Song, Feng, Liuhaodong, Xu, Yang, Wang, Shinan
Publicado 2022

Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

por Guo, Song, Feng, Liuhaodong, Chen, Shuo, Ji, Yucheng, Peng, Xinlin, Xu, Yang, Yin, Yong, Wang, Shinan
Publicado 2022

A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

por Chen, Shuo, Feng, Liuhaodong, Guo, Song, Ji, Yucheng, Zeng, Shuwen, Peng, Xinlin, Xu, Yang, Hu, Tianbao, Wu, Zhenyu, Wang, Shinan
Publicado 2023

Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application

por Feng, Liuhaodong, Zeng, Shuwen, Su, Yongquan, Wang, Lihao, Xu, Yang, Guo, Song, Chen, Shuo, Ji, Yucheng, Peng, Xinlin, Wu, Zhenyu, Wang, Shinan
Publicado 2022