Atomic-Layer-Deposited Aluminum Oxide Thin Films Probed with X-ray Scattering and Compared to Molecular Dynamics and Density Functional Theory Models

por Pugliese, Anthony, Shyam, Badri, Repa, Gil M., Nguyen, Anh Hung, Mehta, Apurva, Webb III, Edmund B., Fredin, Lisa A., Strandwitz, Nicholas C.
Publicado 2022