Effect of Substrate Negative Bias on the Microstructural, Optical, Mechanical, and Laser Damage Resistance Properties of HfO(2) Thin Films Grown by DC Reactive Magnetron Sputtering

por Xi, Yingxue, Qin, Xinghui, Li, Wantong, Luo, Xi, Zhang, Jin, Liu, Weiguo, Yang, Pengfei
Publicado 2023