Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge

por Scopece, Daniele, Döbeli, Max, Passerone, Daniele, Maeder, Xavier, Neels, Antonia, Widrig, Beno, Dommann, Alex, Müller, Ulrich, Ramm, Jürgen
Publicado 2016

Crystallite size-dependent metastable phase formation of TiAlN coatings

por Hans, Marcus, Music, Denis, Chen, Yen-Ting, Patterer, Lena, Eriksson, Anders O., Kurapov, Denis, Ramm, Jürgen, Arndt, Mirjam, Rudigier, Helmut, Schneider, Jochen M.
Publicado 2017