Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

por Khan, Imran, Ranji, Ahmad Rahbar, Nagesh, Gnanesh, Ting, David S.-K., Ahamed, Mohammed Jalal
Publicado 2023

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

por Ranji, Ahmad Rahbar, Damodaran, Vijayakanthan, Li, Kevin, Chen, Zilang, Alirezaee, Shahpour, Ahamed, Mohammed Jalal
Publicado 2022