MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength

por Vicentini Ferreira do Valle, Tiago, Mariani, Stefano, Ghisi, Aldo, De Masi, Biagio, Rizzini, Francesco, Gattere, Gabriele, Valzasina, Carlo
Publicado 2023