Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO(2) Studied by Gas-Phase Infrared and Optical Emission Spectroscopy

por Mione, M. A., Vandalon, V., Mameli, A., Kessels, W. M. M., Roozeboom, F.
Publicado 2021

Isotropic Atomic Layer Etching of ZnO Using Acetylacetone and O(2) Plasma

por Mameli, A., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M., Roozeboom, F.
Publicado 2018

Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials

por Chen, M., Nijboer, M. P., Kovalgin, A. Y., Nijmeijer, A., Roozeboom, F., Luiten-Olieman, M. W. J.
Publicado 2023