Deep multilevel wet etching of fused silica glass microstructures in BOE solution

gan Konstantinova, T. G., Andronic, M. M., Baklykov, D. A., Stukalova, V. E., Ezenkova, D. A., Zikiy, E. V., Bashinova, M. V., Solovev, A. A., Lotkov, E. S., Ryzhikov, I. A., Rodionov, I. A.
Cyhoeddwyd 2023