Beam emittance measurements on multicusp ion sources

por Sarstedt, M, Lee, Y, Leung, K N, Perkins, L T, Pickard, D S, Weber, M, Williams, M D
Publicado 1995

Multicusp sources for ion beam lithography applications

por Leung, K N, Herz, P, Kunkel, W B, Lee, Y, Perkins, L, Pickard, D S, Sarstedt, M, Weber, M, Williams, M D
Publicado 1995

Energy spread of ion beams generated in multicusp ion sources

por Sarstedt, M, Herz, P, Kunkel, W B, Lee, Y, Leung, K N, Perkins, L, Pickard, D S, Weber, M, Williams, M D, Hammel, E
Publicado 1996