Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering

por Prepelita, Petronela, Stavarache, Ionel, Craciun, Doina, Garoi, Florin, Negrila, Catalin, Sbarcea, Beatrice Gabriela, Craciun, Valentin
Publicado 2019