Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning

por Andrle, Anna, Hönicke, Philipp, Gwalt, Grzegorz, Schneider, Philipp-Immanuel, Kayser, Yves, Siewert, Frank, Soltwisch, Victor
Publicado 2021