High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

por Lopez-Rodriguez, Bruno, van der Kolk, Roald, Aggarwal, Samarth, Sharma, Naresh, Li, Zizheng, van der Plaats, Daniel, Scholte, Thomas, Chang, Jin, Gröblacher, Simon, Pereira, Silvania F., Bhaskaran, Harish, Zadeh, Iman Esmaeil
Publicado 2023