Electron-beam lithography for polymer bioMEMS with submicron features

por Scholten, Kee, Meng, Ellis
Publicado 2016

Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems

por Ortigoza-Diaz, Jessica, Scholten, Kee, Larson, Christopher, Cobo, Angelica, Hudson, Trevor, Yoo, James, Baldwin, Alex, Weltman Hirschberg, Ahuva, Meng, Ellis
Publicado 2018

Polymer Implantable Electrode Foundry: A shared resource for manufacturing polymer-based microelectrodes for neural interfaces

por Scholten, Kee, Xu, Huijing, Lu, Zhouxiao, Jiang, Wenxuan, Ortigoza-Diaz, Jessica, Petrossians, Artin, Orler, Steven, Gallonio, Rachael, Liu, Xin, Song, Dong, Meng, Ellis
Publicado 2023