A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping

por Peng, Yingchun, Wen, Zhiyu, Li, Dongling, Shang, Zhengguo
Publicado 2017

Simulation Study of Inertial Micro-Switch as Influenced by Squeeze-Film Damping and Applied Acceleration Load

por Peng, Yingchun, Wen, Zhiyu, Li, Dongling, Shang, Zhengguo
Publicado 2016

Investigation of Au/Si Eutectic Wafer Bonding for MEMS Accelerometers

por Li, Dongling, Shang, Zhengguo, She, Yin, Wen, Zhiyu
Publicado 2017

Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer

por Li, Dongling, Wen, Zhiyu, Wen, Zhongquan, He, Xuefeng, Yang, Yinchuan, Shang, Zhengguo
Publicado 2009