Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO(2)

por D’Acunto, Giulio, Tsyshevsky, Roman, Shayesteh, Payam, Gallet, Jean-Jacques, Bournel, Fabrice, Rochet, François, Pinsard, Indiana, Timm, Rainer, Head, Ashley R., Kuklja, Maija, Schnadt, Joachim
Publicado 2023