The microstructure of Si surface layers after plasma-immersion He(+) ion implantation and subsequent thermal annealing

por Lomov, Andrey, Shcherbachev, Kirill, Chesnokov, Yurii, Kiselev, Dmitry
Publicado 2017

Defect structure transformation after thermal annealing in a surface layer of Zn-implanted Si(001) substrates

por Shcherbachev, Kirill, Privezentsev, Vladimir, Kulikauskas, Vaclav, Zatekin, Vladimir, Saraykin, Vladimir
Publicado 2013