Effect of Substrate-RF on Sub-200 nm Al(0.7)Sc(0.3)N Thin Films

por Pirro, Michele, Zhao, Xuanyi, Herrera, Bernard, Simeoni, Pietro, Rinaldi, Matteo
Publicado 2022

Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamé Mode Resonators

por Assylbekova, Meruyert, Pirro, Michele, Zhao, Xuanyi, Michetti, Giuseppe, Simeoni, Pietro, Rinaldi, Matteo
Publicado 2023