Conformal SiO(2) coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition

por Sobel, Nicolas, Hess, Christian, Lukas, Manuela, Spende, Anne, Stühn, Bernd, Toimil-Molares, M E, Trautmann, Christina
Publicado 2015

Conical Nanotubes Synthesized by Atomic Layer Deposition of Al(2)O(3), TiO(2), and SiO(2) in Etched Ion-Track Nanochannels

por Ulrich, Nils, Spende, Anne, Burr, Loïc, Sobel, Nicolas, Schubert, Ina, Hess, Christian, Trautmann, Christina, Toimil-Molares, Maria Eugenia
Publicado 2021