Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO(2)...

por Chiappim, William, Testoni, Giorgio, Miranda, Felipe, Fraga, Mariana, Furlan, Humber, Saravia, David Ardiles, Sobrinho, Argemiro da Silva, Petraconi, Gilberto, Maciel, Homero, Pessoa, Rodrigo
Publicado 2021

Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching

por Chiappim, William, Neto, Benedito Botan, Shiotani, Michaela, Karnopp, Júlia, Gonçalves, Luan, Chaves, João Pedro, Sobrinho, Argemiro da Silva, Leitão, Joaquim Pratas, Fraga, Mariana, Pessoa, Rodrigo
Publicado 2022