Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible [Formula: see text]

por Nian, Laixia, Zou, Yang, Gao, Chao, Zhou, Yu, Fan, Yuchen, Wang, Jian, Liu, Wenjuan, Liu, Yan, Soon, Jeffrey Bowoon, Cai, Yao, Sun, Chengliang
Publicado 2022