Can We Rationally Design and Operate Spatial Atomic Layer Deposition Systems for Steering the Growth Regime of Thin Films?

por Vale, João Pedro, Sekkat, Abderrahime, Gheorghin, Thomas, Sevim, Semih, Mavromanolaki, Eirini, Flouris, Andreas D., Pané, Salvador, Muñoz-Rojas, David, Puigmartí-Luis, Josep, Sotto Mayor, Tiago
Publicado 2023