Polarity Control of an All-Sputtered Epitaxial GaN/AlN/Al Film on a Si(111) Substrate by Intermediate Oxidization

por Nagata, Takahiro, Suemoto, Yuya, Ueoka, Yoshihiro, Mesuda, Masami, Sang, Liwen, Chikyow, Toyohiro
Publicado 2022