Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration

por Xu, Qiu, Yang, Zhuo-Qing, Fu, Bo, Bao, Yan-Ping, Wu, Hao, Sun, Yun-Na, Zhao, Meng-Yuan, Li, Jian, Ding, Gui-Fu, Zhao, Xiao-Lin
Publicado 2017