Activation of nitrogen species mixed with Ar and H(2)S plasma for directly N-doped TMD films synthesis

por Cho, Jinill, Seok, Hyunho, Lee, Inkoo, Lee, Jaewon, Kim, Eungchul, Sung, Dougyong, Baek, In-Keun, Lee, Cheol-Hun, Kim, Taesung
Publicado 2022