Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS

por Ratzsch, Stephan, Kley, Ernst-Bernhard, Tünnermann, Andreas, Szeghalmi, Adriana
Publicado 2015

Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir

por Franz, Mathias, Junghans, Romy, Schmitt, Paul, Szeghalmi, Adriana, Schulz, Stefan E
Publicado 2020

Iridium wire grid polarizer fabricated using atomic layer deposition

por Weber, Thomas, Käsebier, Thomas, Szeghalmi, Adriana, Knez, Mato, Kley, Ernst-Bernhard, Tünnermann, Andreas
Publicado 2011

The Creatine Kinase/Creatine Connection to Alzheimer's Disease: CK Inactivation, APP-CK Complexes, and Focal Creatine Deposits

por Bürklen, Tanja S., Schlattner, Uwe, Homayouni, Ramin, Gough, Kathleen, Rak, Margaret, Szeghalmi, Adriana, Wallimann, Theo
Publicado 2006

Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling

por Mayer, Marcel, Keskinbora, Kahraman, Grévent, Corinne, Szeghalmi, Adriana, Knez, Mato, Weigand, Markus, Snigirev, Anatoly, Snigireva, Irina, Schütz, Gisela
Publicado 2013

Precision Tailoring Quasi-BIC Resonance of a-Si:H Metasurfaces

por Kuppadakkath, Athira, Barreda, Ángela, Ghazaryan, Lilit, Bucher, Tobias, Koshelev, Kirill, Pertsch, Thomas, Szeghalmi, Adriana, Choi, Duk, Staude, Isabelle, Eilenberger, Falk
Publicado 2023

Carrier-envelope phase on-chip scanner and control of laser beams

por Hanus, Václav, Fehér, Beatrix, Csajbók, Viktória, Sándor, Péter, Pápa, Zsuzsanna, Budai, Judit, Wang, Zilong, Paul, Pallabi, Szeghalmi, Adriana, Dombi, Péter
Publicado 2023

Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies

por Faraz, Tahsin, Knoops, Harm C. M., Verheijen, Marcel A., van Helvoirt, Cristian A. A., Karwal, Saurabh, Sharma, Akhil, Beladiya, Vivek, Szeghalmi, Adriana, Hausmann, Dennis M., Henri, Jon, Creatore, Mariadriana, Kessels, Wilhelmus M. M.
Publicado 2018