Full-range birefringence control with piezoelectric MEMS-based metasurfaces

por Meng, Chao, Thrane, Paul C. V., Ding, Fei, Bozhevolnyi, Sergey I.
Publicado 2022

MEMS Tunable Metasurfaces Based on Gap Plasmon or Fabry–Pérot Resonances

por Thrane, Paul C. V., Meng, Chao, Ding, Fei, Bozhevolnyi, Sergey I.
Publicado 2022

UV-Nanoimprint Lithography for Predefined SERS Nanopatterns Which Are Reproducible at Low Cost and High Throughput

por Milenko, Karolina, Dullo, Firehun Tsige, Thrane, Paul C. V., Skokic, Zeljko, Dirdal, Christopher A.
Publicado 2023

Dynamic piezoelectric MEMS-based optical metasurfaces

por Meng, Chao, Thrane, Paul C. V., Ding, Fei, Gjessing, Jo, Thomaschewski, Martin, Wu, Cuo, Dirdal, Christopher, Bozhevolnyi, Sergey I.
Publicado 2021

UV-Nanoimprint and Deep Reactive Ion Etching of High Efficiency Silicon Metalenses: High Throughput at Low Cost with Excellent Resolution and Repeatability

por Dirdal, Christopher A., Milenko, Karolina, Summanwar, Anand, Dullo, Firehun T., Thrane, Paul C. V., Rasoga, Oana, Avram, Andrei M., Dinescu, Adrian, Baracu, Angela M.
Publicado 2023