Chemically Stable Atomic-Layer-Deposited Al(2)O(3) Films for Processability

por Broas, Mikael, Kanninen, Olli, Vuorinen, Vesa, Tilli, Markku, Paulasto-Kröckel, Mervi
Publicado 2017

Handbook of silicon based MEMS materials and technologies

por Tilli, Markku, Motooka, Teruaki, Airaksinen, Veli-Matti, Franssila, Sami, Paulasto-Krockel, Mervi, Lindroos, Veikko
Publicado 2015