The Method of Low-Temperature ICP Etching of InP/InGaAsP Heterostructures in Cl(2)-Based Plasma for Integrated Optics Applications

por Ishutkin, Sergey, Arykov, Vadim, Yunusov, Igor, Stepanenko, Mikhail, Smirnov, Vyacheslav, Troyan, Pavel, Zhidik, Yury
Publicado 2021