A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process

por Rao, Kang, Wei, Xiaoli, Zhang, Shaolin, Zhang, Mengqi, Hu, Chenyuan, Liu, Huafeng, Tu, Liang-Cheng
Publicado 2019

An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer

por Song, Xiaoxiao, Liu, Huafeng, Fang, Yanyan, Zhao, Chun, Qu, Ziqiang, Wang, Qiu, Tu, Liang-Cheng
Publicado 2020

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

por Li, Zhu, Wu, Wen Jie, Zheng, Pan Pan, Liu, Jin Quan, Fan, Ji, Tu, Liang Cheng
Publicado 2016

Precision measurement of the Newtonian gravitational constant

por Xue, Chao, Liu, Jian-Ping, Li, Qing, Wu, Jun-Fei, Yang, Shan-Qing, Liu, Qi, Shao, Cheng-Gang, Tu, Liang-Cheng, Hu, Zhong-Kun, Luo, Jun
Publicado 2020