Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles

por Dastidar, Avik Ghosh, Maity, Reshmi, Tiwari, Ramesh Chandra, Vidojevic, Dejan, Kevkic, Tijana S., Nikolic, Vojkan, Das, Subhajit, Maity, Niladri Pratap
Publicado 2023