Integration of CMOS-electronics and particle detector diodes in high-resistivity silicon-on-insulator wafers

por Dierickx, B, Wouters, D., Willems, G., Alaerts, A., Debusschere, I., Simoen, E., Vlummens, J., Akimoto, H., Claeys, C., Maes, H., Hermans, L., Heijne, E.H.M., Jarron, P., Anghinolfi, Francis, Campbell, M, Pengg, F X, Aspell, P, Bosisio, L, Focardi, E, Forti, F., Kashigin, S., Mekkaoui, A., Habrard, M.C., Sauvage, D., Delpierre, P.
Publicado 1993