Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

por Wang, Bao-Xu, Qi, Jin-Yong, Lu, Yi-Ming, Zheng, Jia-Xin, Xu, Ying, Liu, Xue-Qing
Publicado 2022

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

por Wang, Bao-Xu, Zheng, Jia-Xin, Qi, Jin-Yong, Guo, Ming-Rui, Gao, Bing-Rong, Liu, Xue-Qing
Publicado 2022