Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids

por Huang, Linya, Li, Wei, Luo, Guoxi, Lu, Dejiang, Zhao, Libo, Yang, Ping, Wang, Xiaozhang, Wang, Jiuhong, Lin, Qijing, Jiang, Zhuangde
Publicado 2022

Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

por Yu, Mingzhi, Zhao, Libo, Chen, Shanshan, Han, Xiangguang, Jia, Chen, Xia, Yong, Wang, Xiaozhang, Wang, Yonglu, Yang, Ping, Lu, Dejiang, Jiang, Zhuangde
Publicado 2023

Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers

por Yuan, Jiawei, Li, Zhikang, Ma, Qi, Li, Jie, Li, Zixuan, Zhao, Yihe, Qin, Shaohui, Shi, Xuan, Zhao, Libo, Yang, Ping, Luo, Guoxi, Wang, Xiaozhang, Teh, Kwok Siong, Jiang, Zhuangde
Publicado 2023