Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor

por Zeng, Yaxiang, Sanders, Remco, Wiegerink, Remco J., Lötters, Joost C.
Publicado 2022

Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor

por Yariesbouei, Mahdieh, Sanders, Remco G. P., Wiegerink, Remco J., Lötters, Joost C.
Publicado 2023

On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers

por Qiao, Zhiliang, Boom, Boris A., Annema, Anne-Johan, Wiegerink, Remco J., Nauta, Bram
Publicado 2018

Thermal Flow Meter with Integrated Thermal Conductivity Sensor

por Azadi Kenari, Shirin, Wiegerink, Remco J., Veltkamp, Henk-Willem, Sanders, Remco G. P., Lötters, Joost C.
Publicado 2023

Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD

por Veltkamp, Henk-Willem, Janssens, Yves L., de Boer, Meint J., Zhao, Yiyuan, Wiegerink, Remco J., Tas, Niels R., Lötters, Joost C.
Publicado 2022

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology

por Zhao, Yiyuan, Veltkamp, Henk-Willem, Schut, Thomas V. P., Sanders, Remco G. P., Breazu, Bogdan, Groenesteijn, Jarno, de Boer, Meint J., Wiegerink, Remco J., Lötters, Joost C.
Publicado 2020