Overall reaction mechanism for a full atomic layer deposition cycle of W films on TiN surfaces: first-principles study

por Park, Hwanyeol, Lee, Sungwoo, Kim, Ho Jun, Woo, Daekwang, Lee, Jong Myeong, Yoon, Euijoon, Lee, Gun-Do
Publicado 2018

Effects of H(2) and N(2) treatment for B(2)H(6) dosing process on TiN surfaces during atomic layer deposition: an ab initio study

por Park, Hwanyeol, Lee, Sungwoo, Kim, Ho Jun, Woo, Daekwang, Park, Se Jun, Kim, Kangsoo, Yoon, Euijoon, Lee, Gun-Do
Publicado 2018

First principles investigation on energetics, structure, and mechanical properties of amorphous carbon films doped with B, N, and Cl

por Park, Hwanyeol, Woo, Daekwang, Lee, Jong Myeong, Park, Se Jun, Lee, Sungwoo, Kim, Ho Jun, Yoon, Euijoon, Lee, Gun-Do
Publicado 2019

The influence of hydrogen concentration in amorphous carbon films on mechanical properties and fluorine penetration: a density functional theory and ab initio molecular dynamics st...

por Park, Hwanyeol, Woo, Daekwang, Lee, Jong Myeong, Park, Se Jun, Lee, Sungwoo, Kim, Ho Jun, Yoon, Euijoon, Lee, Gun-Do
Publicado 2020