Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model

por Sun, Jiamian, Li, Haiwang, Wu, Sifan, Xu, Tiantong, Li, Hanqing, Wu, Hanxiao, Xia, Shuangzhi
Publicado 2020