Nonlinear Effects of Pulsed Ion Beam in Ultra-High Resolution Material Removal

por Xie, Lingbo, Tian, Ye, Shi, Feng, Song, Ci, Tie, Guipeng, Zhou, Gang, Shao, Jianda, Liu, Shijie
Publicado 2022

Figuring Method of High Convergence Ratio for Pulsed Ion Beams Based on Frequency-Domain Parameter Control

por Xie, Lingbo, Tian, Ye, Shi, Feng, Zhou, Gang, Guo, Shuangpeng, Zhu, Zhe, Song, Ci, Tie, Guipeng
Publicado 2022

Low-Energy Pulsed Ion Beam Technology with Ultra-High Material Removal Resolution and Widely Adjustable Removal Efficiency

por Zhou, Guangqi, Tian, Ye, Shi, Feng, Song, Ci, Tie, Guipeng, Zhou, Gang, Xie, Lingbo, Shao, Jianda, Wu, Zhouling
Publicado 2021