Structural, electrical, and optical properties of Ti-doped ZnO films fabricated by atomic layer deposition

por Ye, Zhi-Yuan, Lu, Hong-Liang, Geng, Yang, Gu, Yu-Zhu, Xie, Zhang-Yi, Zhang, Yuan, Sun, Qing-Qing, Ding, Shi-Jin, Zhang, David Wei
Publicado 2013