Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High-κ Y(2)O(3) on GaAs(001)-4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy

por Cheng, Chiu-Ping, Chen, Wan-Sin, Cheng, Yi-Ting, Wan, Hsien-Wen, Yang, Cheng-Yeh, Pi, Tun-Wen, Kwo, Jueinai, Hong, Minghwei
Publicado 2018