H(2) Plasma and PMA Effects on PEALD-Al(2)O(3) Films with Different O(2) Plasma Exposure Times for CIS Passivation Layers

por An, Jehyun, Choi, Kyeongkeun, Park, Jongseo, Kang, Bohyeon, You, Hyunseo, Ahn, Sungmin, Baek, Rockhyun
Publicado 2023