Investigation into SiO(2) Etching Characteristics Using Fluorocarbon Capacitively Coupled Plasmas: Etching with Radical/Ion Flux-Controlled

por Jeong, Won-nyoung, Lee, Young-seok, Cho, Chul-hee, Seong, In-ho, You, Shin-jae
Publicado 2022

Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe

por Kim, Si-jun, Lee, Jang-jae, Lee, Young-seok, Cho, Chul-hee, You, Shin-jae
Publicado 2022

Database Development of SiO(2) Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe

por Lee, Youngseok, Yeom, Heejung, Choi, Daehan, Kim, Sijun, Lee, Jangjae, Kim, Junghyung, Lee, Hyochang, You, ShinJae
Publicado 2022

Role of Oxygen in Amorphous Carbon Hard Mask Plasma Etching

por Yeom, Hee-Jung, Yoon, Min Young, Choi, Daehan, Lee, Youngseok, Kim, Jung-Hyung, You, Shin-Jae, Lee, Hyo-Chang
Publicado 2023

On Encapsulated Dielectric Barrier Discharge Plasma Sources for Radar Cross Section Reduction in Mobile Environments

por Choi, Minsu, You, Shin-Jae, Jung, Jinwoo, Cho, Changseok, Lee, Yongshik, Kim, Cheonyoung, Ha, Jungje, Lee, Hyunsoo, Seol, Youbin
Publicado 2023

Impact of Plasma Electron Flux on Plasma Damage‐Free Sputtering of Ultrathin Tin‐Doped Indium Oxide Contact Layer on p‐GaN for InGaN/GaN Light‐Emitting Diodes

por Son, Kwang Jeong, Kim, Tae Kyoung, Cha, Yu‐Jung, Oh, Seung Kyu, You, Shin‐Jae, Ryou, Jae‐Hyun, Kwak, Joon Seop
Publicado 2017

Comprehensive Assessments in Bonding Energy of Plasma Assisted Si-SiO(2) Direct Wafer Bonding after Low Temperature Rapid Thermal Annealing

por Lee, Youngseok, You, Yebin, Cho, Chulhee, Kim, Sijun, Lee, Jangjae, Kim, Minyoung, Lee, Hanglim, You, Youngjun, Kim, Kyungman, You, ShinJae
Publicado 2022

Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

por Kim, Si-jun, Lee, Sang-ho, You, Ye-bin, Lee, Young-seok, Seong, In-ho, Cho, Chul-hee, Lee, Jang-jae, You, Shin-jae
Publicado 2022

Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation

por Kim, Si-jun, Seong, In-ho, Lee, Young-seok, Cho, Chul-hee, Jeong, Won-nyoung, You, Ye-bin, Lee, Jang-jae, You, Shin-jae
Publicado 2022

Influence of Additive N(2) on O(2) Plasma Ashing Process in Inductively Coupled Plasma

por You, Ye-Bin, Lee, Young-Seok, Kim, Si-Jun, Cho, Chul-Hee, Seong, In-Ho, Jeong, Won-Nyoung, Choi, Min-Su, You, Shin-Jae
Publicado 2022

Observation of prior light emission before arcing development in a low-temperature plasma with multiple snapshot analysis

por Kim, Si-jun, Lee, Young-seok, Cho, Chul-hee, Choi, Min-su, Seong, In-ho, Lee, Jang-jae, Kim, Dae-woong, You, Shin-jae
Publicado 2022

Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Disp...

por Kim, Si-Jun, Choi, Min-Su, Lee, Sang-Ho, Jeong, Won-Nyoung, Lee, Young-Seok, Seong, In-Ho, Cho, Chul-Hee, Kim, Dae-Woong, You, Shin-Jae
Publicado 2023