Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

por Kim, Si-jun, Lee, Sang-ho, You, Ye-bin, Lee, Young-seok, Seong, In-ho, Cho, Chul-hee, Lee, Jang-jae, You, Shin-jae
Publicado 2022

Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation

por Kim, Si-jun, Seong, In-ho, Lee, Young-seok, Cho, Chul-hee, Jeong, Won-nyoung, You, Ye-bin, Lee, Jang-jae, You, Shin-jae
Publicado 2022

Influence of Additive N(2) on O(2) Plasma Ashing Process in Inductively Coupled Plasma

por You, Ye-Bin, Lee, Young-Seok, Kim, Si-Jun, Cho, Chul-Hee, Seong, In-Ho, Jeong, Won-Nyoung, Choi, Min-Su, You, Shin-Jae
Publicado 2022