Lithographic Performance of Aryl Epoxy Thermoset Resins as Negative Tone Photoresist for Microlithography

por Vlnieska, Vitor, Zakharova, Margarita, Mikhaylov, Andrey, Kunka, Danays
Publicado 2020

Single-Shot Multicontrast X-ray Imaging for In Situ Visualization of Chemical Reaction Products

por Zakharova, Margarita, Mikhaylov, Andrey, Vlnieska, Vitor, Kunka, Danays
Publicado 2021

Epoxy Resins for Negative Tone Photoresists

por Vlnieska, Vitor, Mikhaylov, Andrey, Zakharova, Margarita, Blasco, Eva, Kunka, Danays
Publicado 2019

Shack–Hartmann wavefront sensors based on 2D refractive lens arrays and super-resolution multi-contrast X-ray imaging

por Mikhaylov, Andrey, Reich, Stefan, Zakharova, Margarita, Vlnieska, Vitor, Laptev, Roman, Plech, Anton, Kunka, Danays
Publicado 2020

Structural and Thermal Characterisation of Nanofilms by Time-Resolved X-ray Scattering

por Plech, Anton, Krause, Bärbel, Baumbach, Tilo, Zakharova, Margarita, Eon, Soizic, Girmen, Caroline, Buth, Gernot, Bracht, Hartmut
Publicado 2019