Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range

por Zhao, Ming-Jie, Zhang, Jin-Fa, Huang, Jie, Chen, Zuo-Zhu, Xie, An, Wu, Wan-Yu, Huang, Chien-Jung, Wuu, Dong-Sing, Lien, Shui-Yang, Zhu, Wen-Zhang
Publicado 2022