Compact Ga(2)O(3) Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature

por Yang, Yue, Zhang, Xiao-Ying, Wang, Chen, Ren, Fang-Bin, Zhu, Run-Feng, Hsu, Chia-Hsun, Wu, Wan-Yu, Wuu, Dong-Sing, Gao, Peng, Ruan, Yu-Jiao, Lien, Shui-Yang, Zhu, Wen-Zhang
Publicado 2022