Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices

por Berenschot, Erwin, Tiggelaar, Roald M., Borgelink, Bjorn, van Kampen, Chris, Deenen, Cristian S., Pordeli, Yasser, Witteveen, Haye, Gardeniers, Han J. G. E., Tas, Niels R.
Publicado 2022