Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

por Romijn, Joost, Vollebregt, Sten, Middelburg, Luke M., Mansouri, Brahim El, van Zeijl, Henk W., May, Alexander, Erlbacher, Tobias, Leijtens, Johan, Zhang, Guoqi, Sarro, Pasqualina M.
Publicado 2022

High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

por El Mansouri, Brahim, Middelburg, Luke M., Poelma, René H., Zhang, Guo Qi, van Zeijl, Henk W., Wei, Jia, Jiang, Hui, Vogel, Johan G., van Driel, Willem D.
Publicado 2019