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The MEMS handbook
| Otros Autores: | |
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| Formato: | Libro |
| Lenguaje: | English |
| Publicado: |
Boca Raton, FL :
CRC/Taylor & Francis,
2006.
|
| Edición: | 2nd ed. |
| Colección: | Mechanical engineering series (Boca Raton, Fla.)
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| Materias: | |
| Acceso en línea: | Available to Stanford-affiliated users at: Available to Stanford-affiliated users at: Available to Stanford-affiliated users at: available to Stanford-affiliated users at: available to Stanford-affiliated users at: available to Stanford-affiliated users at: V. 1. available to Stanford-affiliated users at: V. 2 available to Stanford-affiliated users at: V. 3 available to Stanford-affiliated users at: |
Tabla de Contenidos:
- [v. 1]. MEMS, introduction and fundamentals
- [v. 2]. MEMS, design and fabrication
- [v. 3]. MEMS, applications.